About: http://webisa.webdatacommons.org/438712436

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6 is a schematic and not-to-scale representation of the optical imaging arrangement in the form of an optical exposure apparatus 401 operating in the EUV range at a wavelength of 13 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com