About: http://webisa.webdatacommons.org/438866949

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7A is a side view for explaining a pitch changing mechanism of the cassette transfer and wafer transfer device for use in the first through seventh embodiments of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com