About: http://webisa.webdatacommons.org/438962038

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Dielectric layers 14 and 18 may also be deposited using such deposition and thermal processes as chemical vapor deposition (CVD), plasma enhanced CVD, rapid thermal processing, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com