About: http://webisa.webdatacommons.org/439156680

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a material for the gate insulating film 102, an organic or inorganic material such as silicon nitride oxide (SiON), silicon oxide (SiO2), silicon nitride (SiN), siloxane, polysilazane, and polyvinyl alcohol, may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com