About: http://webisa.webdatacommons.org/439224664

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A signal processor as in claim 37, wherein:the substrate is a semiconductor, and the dielectric layer is made of a material selected from the group consisting of an insulative oxide, an insulative nitride and a polymer. 46.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es