About: http://webisa.webdatacommons.org/43930838

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Defects / ADC Instruments with the ability to detect residual traces of films or depressions (dimple defects) or patterned conductor or pad flaws on the surface of a substrate or wafer after polishing, CMP, etching, or other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	globalspec.com