About: http://webisa.webdatacommons.org/439348635

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Holes or apertures such as 20,21 are opened in the layer of silicon dioxide or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com