About: http://webisa.webdatacommons.org/439643139

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, intermediate dielectric layer 220 can be formed by depositing layer of Al2O3 on high-k dielectric layer 216 using a MBE process or an ALD process or other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com