About: http://webisa.webdatacommons.org/439831196

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Advantageously, MEMS switches may be manufactured on various substrates, such as glass substrates, silicon or plastic substrates, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk