About: http://webisa.webdatacommons.org/439981467

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thermal activation can be conducted by using a method such as laser irradiation, RTA, or heat treatment using a furnace.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com