About: http://webisa.webdatacommons.org/440088821

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The spacer material can be a dielectric, such as silicon nitride, silicon oxide, silicon oxynitride or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com