About: http://webisa.webdatacommons.org/440115914

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deep trenches 400 are etched using a process such as ion milling, reactive ion etching (???RIE???), or chemical etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com