PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The first MUSIC photoresist element 603 may be formed along the top surface 608 of the MUSIC photoresist 601, and may be formed to have a thickness of between about 5 nm and about 40 nm, such as about 20 nm.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com