About: http://webisa.webdatacommons.org/440589426

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a system for inspecting a wafer, including inspecting both sides of a dual sided wafer or specimen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com