About: http://webisa.webdatacommons.org/440856450

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma, for example a capacitively coupled plasma, may be generated in a reaction chamber such as a Matrix 1178 chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca