About: http://webisa.webdatacommons.org/440945762

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When an element, particularly a memory element is obtained according to the above-mentioned method for fabricating a semiconductor device, fine patterns can be formed to increase a degree of its integration.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com