About: http://webisa.webdatacommons.org/441033626

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a contact hole is formed in a predetermined region of the interlayer insulation layer 20 and a conductor formed of such as polycrystalline silicon or tungsten is buried in the contact hole (not shown).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com