About: http://webisa.webdatacommons.org/441355913

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If necessary, another planarization process, such as CMP, for example, may be carried out to obtain good surface planarity (i.e., flatness).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com