About: http://webisa.webdatacommons.org/441659770

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Usualty, the resist composition of the present invention is composed mainly of four components, i.e., any of the above-mentioned polymer components (i) to (iii), the acid generator, the present invention's compound and the solvent.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au