PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • First, a suitable etch mask such as silicon dioxide or silicon nitride is deposited or grown on both sides of wafer 3.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com