About: http://webisa.webdatacommons.org/442144725

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Here, the workpiece such as a silicon wafer is covered with a light-sensitive material called photoresist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es