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http://webisa.webdatacommons.org/442300199
Property
Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
Meanwhile, any material, such as metal, semiconductor (a silicon wafer or the like) and insulating substance (such as glass, quartz and polymer film), can be used as the substrate material.
http://www.w3.org/ns/prov#wasQuotedFrom
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