About: http://webisa.webdatacommons.org/442506227

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	exposed to light through a mask to form transistors and other circuit elements comprising a semiconductor.
http://www.w3.org/ns/prov#wasQuotedFrom	sec.gov