About: http://webisa.webdatacommons.org/442961669

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, the desired dielectric materials need to be able to withstand processing steps, such as high temperature anneal, chemical mechanical polishing (CMP), RIE etch, HF wet etch and cleaning steps.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com