About: http://webisa.webdatacommons.org/442969458

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequent deposition of Si from SiH4 and C from CH4 at a substrate temperature of 600??? C. layer by layer will not initiate micropipes and other defects that seem to occur even at 2,000??? C. or higher.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au