About: http://webisa.webdatacommons.org/443010374

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Examples of non-flexible substrates used in IC photolithography include silicon, aluminum oxide, and other ceramics.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk