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http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Patent US5426061 - Impurity gettering in semiconductors - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsA process for impurity gettering in a semiconductor substrate or device such as a silicon substrate or device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com