About: http://webisa.webdatacommons.org/443686105

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate electrode may be formed by a technique such as atomic layer deposition, sputtering, e-beam deposition, or other methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es