About: http://webisa.webdatacommons.org/443690049

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This removal and other steps are illustrated by FIGS. 17C, 17D, and 17E. Reactive ion etching may be used to form the spacers, removing excess spacer material above and in regions between the nitride strips 1709.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com