About: http://webisa.webdatacommons.org/443917537

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, a reaction layer of a compound principally including silicon and nitrogen is never formed or is formed in merely a small thickness between the first barrier metal layer and the silicon-containing film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com