| http://www.w3.org/ns/prov#value | - When the plasma system 1500 includes a fused quartz vessel, the system 1500 is preferably operated under conditions that limit the maximum temperature of the inside of the quartz plasma vessel to approximately 900 to 1000??? C., for example, less than 950??? C. At relatively high temperatures, microscopic changes including damage can appear on the inner surface of the quartz.
|
