About: http://webisa.webdatacommons.org/444136292

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, what is required is a system which greatly reduces the number of test wafers required for properly calibrate a CMP process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com