About: http://webisa.webdatacommons.org/444165408

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 5 wherein an interface including an unexposed face of the strained layer exhibits a roughness less than 1 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com