About: http://webisa.webdatacommons.org/444188869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The control unit 110 is responsible for automated control of the numerous steps required for wafer processing???such as wafer transport, gas flow control, temperature control, chamber evacuation, and other steps.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com