About: http://webisa.webdatacommons.org/444259934

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thinning process may involve grinding and/or etching, preferably a silicon back etch process such as wet etch or plasma etch.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr