About: http://webisa.webdatacommons.org/444365682

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, the silicon wafer is subjected to various processing steps including the step of forming a nitride film by an LPCVD method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com