About: http://webisa.webdatacommons.org/444418675

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to an electrostatic chuck and more particularly to an improved electrostatic chuck for securing a work by electrostatic forces in a vacuum process apparatus such as a dry-etching apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com