About: http://webisa.webdatacommons.org/444513652

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface protrusions 18 are removed from the thin film layer 14 through a process, such as etching, which is known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com