About: http://webisa.webdatacommons.org/444514048

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 5 wherein said conductive plugs comprise doped polysilicon plugs, said method including the steps as follows:
http://www.w3.org/ns/prov#wasQuotedFrom	google.es