| http://www.w3.org/ns/prov#value | - The condition of sputtering can be set as follows: the distance between the substrate 200 and the target is 30 mm to 500 mm, the pressure is 0.1 Pa to 2.0 Pa, the direct current (DC) power supply is 0.25 kW to 5.0 kW, the temperature is 20??? C. to 100??? C., the atmosphere is an argon atmosphere, an oxygen atmosphere, or a mixture atmosphere of argon and oxygen, for example.
|
