About: http://webisa.webdatacommons.org/444593642

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gas excitation system 100 may also be used to process solid materials such as semiconductor wafers, powders, and other gases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com