About: http://webisa.webdatacommons.org/444683574

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, conventionally, it has not yet been successful in utilizing dry cleaning to efficiently clean a process chamber contaminated with metal, such as tungsten (W).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com