About: http://webisa.webdatacommons.org/445082814

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, various kinds of via holes exist in semiconductor devices and the size and depth of these via holes are quite different depending on the use of the via holes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com