About: http://webisa.webdatacommons.org/445129354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Source and drain electrodes as well as wires 333 through 335 are formed by metallic materials such as multi-layered film of titanium and aluminum to the contact holes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com