About: http://webisa.webdatacommons.org/445187205

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, second layer wirings 119 are formed at the areas including a portion above the via hole 116, and a cover film 120 formed of a plasma SiON is present thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com