About: http://webisa.webdatacommons.org/445256519

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As defined herein, the term ???ALD??? refers to (and includes) all variants of the ALD techniques, such as, for example and without limitation, ALCVD, Low Pressure ALD (LPALD) and Plasma Enhanced ALD (PEALD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com