About: http://webisa.webdatacommons.org/445257196

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As described above, a barrier film 105 formed by a material such as Ta, TaN, Ti, or TiN can be completely removed and, at the same time, occurrence of dishing and erosion due to over polish can be suppressed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au