About: http://webisa.webdatacommons.org/445257894

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 14 shows a conventional scan type projection exposure apparatus which includes such a mechanism as a sensor or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com