| http://www.w3.org/ns/prov#value | - As previously indicated, the valve assemblies 152, 164, 168, 170 and 172 were made by a technique as illustrated in FIGS. 5A-5E. As with the beam of FIGS. 5A-5E, if sticking of any of these beams is a problem, the surface of the beam and/or the attracting surface can be coated with bumps, such as 232 and 234 in FIGS. 5D, 5E, 6A and 6B, or roughened to form integral bumps.
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