About: http://webisa.webdatacommons.org/445346815

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a material of each of the lower electrode 22 and the upper electrode 26, there is a refractory metal such as Ta, Mo, or W.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com